Hazardous gas monitoring : a guide for semiconductor and other hazardous occupancies 5th ed

CONTENTS 2 3 HAZARDOUS GAS MONITORING Best Industry Practice & Code Intent Prescriptive versus Performance Occupancy Classifications Research Laboratory Facilities Alterations to Existing Facilities Risk Management & Corporate Safety Standards REGULATED MATERIALS Concentrations Health Hazard Rating Registry of Toxic Effects of Chemical Substances Flammability Hazard Rating Reactivity Hazard Rating Material Hazard Index Refrigerant Classifications Material Safety Data Sheets Monitoring Measurements SUMMARY OF HAZARDOUS GAS MONITORING CODES Regional Model Codes Scope of the Code Sections Definition of Terms Uniform Fire Code 1997 Edition Uniform Fire Code 2000 Edition International Fire Code 2000 Edition Standard Fire Prevention Code Sunnyvale CA Toxic Gas Ordinance Santa Clara County Fire Chiefs TGO Guidelines Palo Alto CA Toxic Gas Ordinance 1999 NFPA 55 Standard for Storage, Use and Handling of Compressed and Liquified Gases in Portable Cylinders NFPA 31 8 Standard for the Protection of Cleanrooms Federal Requirements Environmental Protection Agency (EPA) Occupational Safety & Health Administration (OSHA) IEC Standard 61 508 Functional Safety- Safety Related Systems ANSI/ISA Standard $84.01 Safety Instrumented Systems for the Process Industries Underwriters Laboratories Standards 1 2 3 3 4 5 5 7 7 8 9 9 10 11 11 11 12 13 13 14 15 16 26 28 42 44 46 48 53 54 57 58 60 63 65 67 4 Oxygen Depletion Monitoring Refrigerant Vapor Alarm Systems Uniform Mechanical Code Requirements Uniform Fire Code Requirements ANSI/ASHRAE Standard 15 Safety Code for Mechanical Refrigeration International Fire Code Requirements Refrigeration Sensors System Testing Requirements HAZARDOUS GAS MONITORING SENSORS Selection Criteria Monitored Gases Sensor Suitability Sensor Sensitivity Sensor Selectivity Sensor Stability Sensor Recalibration Time Sensor Ease of Recalibration Sensor Response Time Sensor Poisoning Sensor Useful Life Sensor Diagnostic Features Sensor Susceptibility to RFI/EMI Total Cost of Ownership (TCO) Sensor Types Manufacturers Electrochemical Sensors Gas Membrane Galvanic Cell Catalytic Bead Sensors Solid State Sensors Quartz Crystal Microbalance Sensors Draeger Tube Sensors Ionization Sensors Extractive Sensing Systems Paper Tape Sensors Spectrophotometric Analysis Molecular Emission Spectrometry Sensors Acoustic Sensors Ozone Monitoring Sensors Problematic Gases Arsine Boron Trifluoride Chlorine Trifluoride Fluorine Hydrogen Nitrogen Trifluoride TEOS Recommended Sensor Locations Sample Area Interference 68 69 69 70 72 74 75 77 81 81 81 82 82 82 82 83 83 83 83 83 84 84 84 85 85 85 87 88 89 90 91 92 92 94 97 98 99 100 100 100 101 102 103 104 105 105 105 108 vi 5 6 Alarm Set Points Using Portable Sensors Sensor Recalibration Other Sensor Considerations Sensing Reaction Byproducts Pyrolyzers Electrically Hazardous Location Requirements Obstructions Environmental Conditions Maintenance Central versus Distributed Systems MONITORING, ALARM AND CONTROL SYSTEMS System Sophistication System Safety versus Reliability System Electrical Supervision System Redundancy Dual Processors with Single I/O Dual Processors with Dual I/O and loo2 Logic Dual Processors with Dual I/O and 20o2 Logic Triple Modular Redundancy (TMR) with 2003 Logic System Diagnostics System Integration System Documentation and Data Acquisition Monitoring-Systems in General PLC-Based Monitoring Systems Triple Modular Redundancy (TMR) Fire Alarm Panel-Based Monitoring Systems Proprietary Network-Based Monitoring Systems LonWorks Network-Based Monitoring Systems System Communication Configurations Other Monitoring System Considerations Emergency Control Station Recommended Programmed Alarm Response Shutdowns Alarm Annunciation Emergency Response Chemical Delivery/Service Corridor Emergency Alarm MONITORING EXHAUST TREATMENT SYSTEM DISCHARGE Code Requirements Monitoring Problems Alternate Materials and Methods Direct Monitoring 109 109 110 112 112 114 114 114 114 115 115 117 117 117 118 120 121 121 122 122 122 123 125 125 127 129 133 135 137 138 139 140 143 145 145 148 148 149 149 150 152 153 vii 7 8 SYSTEM CERTIFICATION Code Requirement Relevant Certification Applicable Standards Third-party Review Organizations CODE ENFORCEMENT System Review Third-party Review & Technical Opinion Alarm System Matrix Safety versus Reliability System Testing Compliance Checklists 155 155 155 156 156 159 159 160 160 161 161 162 APPENDICES AO Table of Typically Monitored Gases BD Zellweger Protocol for Testing Toxic Gas Detectors C. UFC Table A-VI-A-1-Normalization Factor DO Safety System Suppliers 163 167 177 179 GLOSSARY 185 REFERENCES 195 INDEX 203