Semiconductor industry : wafer fab exhaust management
- نوع فایل : کتاب
- زبان : انگلیسی
- مؤلف : J Michael Sherer
- ناشر : Boca Raton : CRC/Taylor & Francis
- چاپ و سال / کشور: 2005
- شابک / ISBN : 9781574447200
Description
Semiconductor and wafer manufacturing facilities -- Exhaust types and challenges -- Point-of-use devices and exhaust-line requirements -- Centralized scrubbers -- Centralized equipment to control volatile organic compounds -- Emergency releases -- Exhaust management and air abatement equipment examples.