Handbook of contamination control in microelectronics : principles, applications, and technology
- نوع فایل : کتاب
- زبان : انگلیسی
- مؤلف : Donald L Tolliver
- ناشر : Park Ridge, N.J., U.S.A. : Noyes Publications
- چاپ و سال / کشور: 1988
- شابک / ISBN : 9781591240815
Description
Contributors Mauro A. Accomazzo Millipore Corporation Bedford, MA Ann Marie Dixon Cleanroom Management Associates Inc. Tempe, AZ Robert Donovan Research Triangle Institute Research Triangle Park, NC David Ensor Research Tria ngl e Institute Research Triangle Park, NC Terry L. Faylor T.L. Faylor & Associates Santa Cruz, CA Gary Ganzi Millipore Corporation Bedford, MA Peter Gise Tencor Instruments Mountain View, CA Bennie W. Goodwin Angelica Uniform Group St. Louis, MO Jeffrey J. Gorsk i Oxnard, CA Robert Kaiser Consultant to Millipore Argos Associates, Inc. Winchester, MA Gerhard Kasper Liquid Air Corporation Countryside, IL Robert G. Knollenberg Particle Measuring Systems Inc. Boulder, CO Benjamin H.Y. Liu University of Minnesota Minneapolis, MN Mary L. Long University of Arizona Tucson, AZ ix x Contributors Rollin McCraty Static Control Services Palm Springs, CA Mike Naggar K.T.1. Chemicals Inc. Sunnyvale, CA Mihir Parikh Asyst Technologies, Inc. Milipitas, CA David Y.H. Pui University of Minnesota Minneapolis, MN Donald L. Tolliver Motorola Semiconductor Sector Motorola Inc. Phoenix, AZ Barclay J. Tullis Hewlett-Packard Laboratories Palo Alto, CA H.Y. Wen Liquid Air Corporation Countryside, I L NOTICE
Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control.
