راهنمای خشم ادا رسوب فناوری: اصول، فناوری و برنامه های کاربردی (علم مواد و تکنولوژی فرایند سری) Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)
- نوع فایل : کتاب
- زبان : انگلیسی
- نویسنده : Kiyotaka Wasa
- چاپ و سال / کشور: 1993
- شابک / ISBN : 0815512805, 9780815512806, 9780815517733
Description
A concise, comprehensive overview of sputter deposition technology?a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
